High-Q Tunable Microwave Cavity Resonators and Filters using SOI-based RF MEMS Tuners
نویسندگان
چکیده
This paper presents the modeling, design, fabrication and measurement of MEMS-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Qu). Integrated electrostatically-actuated thin diaphragms are used for the first time for tuning the frequency of the resonators/filters. An example tunable resonator with 2.6:1 (5.0 − 1.9 GHz) tuning ratio, Qu of 300 − 650 is presented. A continuously tunable 2pole filter from 3.04 GHz to 4.71 GHz with 0.7% bandwidth and insertion loss of 3.55 − 2.38 dB is also shown as a technology demonstrator. Mechanical stability measurements show that the tunable resonators/filters exhibit very low frequency drift (less than 0.5% for 3 hours) under constant bias voltage. This paper significantly expands upon previously reported tunable resonators [1].
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